How Flexible Heaters Are Employed in Wafer Processing?

Flexible heaters are electric heaters with a minimal profile. It consists of a dielectric layer on top of a resistive foil layer. These layers offer electrical isolation but also permit adaptability in the heater.

Thermal heating and temperature control are essential in the semiconductor industry. It is crucial to ensure their productivity and quality. Flexible heaters are quite commonly used in wafer processing.

Wafer processing is a challenging task. It demands the use of advanced, semiconductor-specific heating equipment. For instance, semiconductor wafers must be heated throughout the testing phases. Flexible heaters are useful in the semiconductor industry for many reasons.

What Are Custom Flexible Heaters?

A flexible heater is yet another wire-wound heater. It can be bent or curled to fit the shape of the surface that needs to be heated. Flexible custom heaters are durable, safe, efficient, and effective. It has qualities that make it resistant to chemicals and wetness.

These customized heaters are designed to fulfill your particular needs. These custom heaters are sometimes made to fit practically any type of application, thanks to their thinness, bendability, and ability to be built with the most intricate curves, geometries, and shapes. Flexible heating elements have numerous applications in various industries, businesses, and the military.

Flexible heaters are excellent for use in tough environments and vacuum applications. This is because they are thin and lightweight. Custom heaters have high heat transfer properties. Direct attachment to hot spots is possible with it. It offers rapid maximum temperatures and high power density without compromising dependability or efficiency. It can function at constant temperatures of 392 °F (200  °C) and periodic temperatures of 500 °F (260  °C).

Employment of Flexible Heaters in the Semiconductor Wafer Processing

Flexible heaters are employed in etching systems, electronic circuit testing, and semiconductor wafer testing units. When processing wafers, there is a growing need for high-temperature control and quick thermal heating solutions. Custom flexible heaters are made for effective thermal heating and temperature control.

Custom heaters are created with knowledge of semiconductor technology and their specific requirements. Flexible heaters handle various semiconductor wafer problems. They are also adaptive to market trends impacting the industry.

The market for flexible heaters in the semiconductor wafer sector holds the biggest market share. It is projected to experience the highest CAGR growth during the projection period. Flexible heaters are used in a variety of semiconductor production equipment. It includes plasma etch systems, probing units, IC testing handling devices, photo-resist track systems, LCD screens, and semiconductor testing units.

The following are some of the reasons flexible heaters are employed in wafer processing:

  • Flexible custom heaters have a relatively low outgassing rate. This is because of the custom heaters’ characteristics and their direct binding abilities.
  • Flexible heaters can distribute heat evenly while facilitating excellent heat transfer during wafer processing.
  • As previously stated, flexible heaters are thin. They have high-bending powers. They properly stick to the thing to be heated. This makes it possible for good heat conductivity during semiconductor wafer processing.
  • Flexible heaters are employed in the production of wafers to maintain high temperatures. It is important to note that high temperatures are necessary for the fabrication process.
  • Flexible heaters are employed in the burn-in testing of integrated circuits. Moreover, they give immediate times for heating up and cooling down.
  • The custom heaters can be built with integrated sensors and fuses. To further increase the heating area, multi-layer heater circuits are also available.

Types of Flexible Heaters

Depending on the application, flexible heaters deliver the necessary amount of heat. These heaters can be fitted to curved and heavy machinery in a variety of sizes and applications. By choosing the correct kind of flexible heater, you can get reliable and constant heat. It achieves this without affecting the application’s effectiveness. Let’s take a look at the ideal applications for three types of flex heaters.

Polyimide Flexible Heaters

A polyimide flex heater is made up of an etched foil element layer. It is placed inside two layers of polyimide sheet using FEP or acrylic glue. The flexible heater is quite thin. It might be as thin as 0.007. The heater’s watt density ranges from 2.5 to 50 W/in2.

Flexible polyimide heaters can be employed in applications where working parts may be limited by added weight. It can also be positioned on machinery when there is little space. Therefore, no design details are required for the application to fit the flexible heater. The heater is appropriate for curved and uneven surfaces due to polyimide’s flexibility. It is done without having to be concerned about the heating being rubbed off.

Polyimide heaters are commonly utilized in applications in harsh environments where durability is essential. They can be utilized in the medical, catering, military, and aerospace industries. Additionally, both indoor and outdoor settings are suitable for using the heater.

Silicon Rubber Flexible Heaters

For all-purpose applications, companies use silicon rubber flexible heaters. The piece is made of etched or wire-wound foil. It is sealed between two layers of insulating silicon rubber. Compared to a polyimide flex heater, this heater is thicker. The usual thickness of a wire-wound silicone heater is 0.03″, but an etched foil silicone heater has an approximate thickness of 0.056″.

This heater has a watt density that can go as high as 60 W/in2. You can put a flexible silicone heater on smooth surfaces. It can be employed in settings where a big heater with a range of watt densities is required. When exposed to humid conditions and outdoors, it can also withstand higher temperatures.

Flexible heaters made of silicone rubber are more affordable. They are most frequently employed in general and commercial applications.

Polyester Flexible Heaters

Polyester flex heaters are designed specifically for applications that demand less heat transfer. They have parts composed of insulated wire, indium titanium oxide inks, or etched foil. The components are positioned inside polyester layers that may be transparent. They can have watt densities of up to 20 W/in2. It can be as thin as 0.007.

These heaters are frequently used in applications where moderate to high heat might cause damage. It’s used to clear away any ice or moisture buildup that might develop on parts. For instance, it can be used to warm batteries, de-ice mirror surfaces, and warm cups within coffee makers.

Polyester flex heaters are excellent for irregularly shaped surface applications. Their shape and weight can be significant problems. This is possible due to their flexibility and lightweight nature. It is an excellent choice for smaller applications. Additionally, if a transparent appearance is preferred for the application, this heater can be designed to achieve that.

Lastly

Flexible heaters were created especially for industrial devices, especially for devices that require low to moderate heating levels. Heaters can be customized in every way to meet the needs of the customer. It increases productivity and innovation among semiconductor manufacturers. Make sure the heaters you choose are made by a reputable company with a lot of experience.

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